Overview
Evaporated metals are thin films of metal deposited onto a substrate using thermal evaporation or physical vapor deposition (PVD). This process involves heating a metal source in a vacuum chamber until it vaporizes and condenses on a target surface, forming a uniform layer.
How Are They Used in Semiconductor Fabrication?
- Conductive Layers: Metals like aluminum and copper are evaporated to create conductive pathways in integrated circuits.
- Barrier Layers: Titanium and tantalum are used to prevent diffusion or ensure adhesion between layers.
- Masking Layers: Chromium is used in photolithography to protect specific areas during processing.
- Reflective Coatings: Silver and aluminum are evaporated for reflective surfaces in LEDs and solar cells.
- Contact Pads: Gold and other metals form reliable electrical connections in semiconductor devices.
- Protective Layers: Thin metal films shield surfaces from oxidation and contamination.
Advantages in Semiconductor Fabrication
- Uniform Thickness: Ensures precision for microelectronics.
- High Purity: Vacuum conditions minimize contamination.
- Versatility: Compatible with various metals and substrates.
- Scalability: Suitable for both research and mass production.